DRY Helium leak detector UL1000 Fab (DRY Backing Pump), 100/115 V and US power cable

DRY Helium leak detector UL1000 Fab (DRY Backing Pump), 100/115 V and US power cable



INFICON DRY Helium leak detector UL1000 Fab (DRY Backing Pump), 100/115 V and US power cable

Brochure: DRY UL1000 Fab Helium Leak Detector

Check out our new video showing the Hermetic Seal Test with the INFICON UL1000 Helium Leak Detector

  • wide measurement range over 15 decades
  • short pumpdown and response time
  • mobile all-metal housing for added convenience with uncompromised maneuverability
  • I-CAL to ensure fastest response time to leaks in all measurement ranges
  • zero function with automatic integration time alignment for fast and reliable test results
  • intelligent vacuum design with rugged scroll pump and multiple inlet turbomolecular pump that provides high helium pumping speed with high compression
  • rotatable display and user interface allows simple and easy control and interaction with the unit
  • self-protection features to protect the UL1000 Fab from helium and particle contamination
  • auto purge cycle to ensure clean up and readiness for test
  • software updates via email
  • rugged mass spectrometer system with two filament ion source (3-year warranty) ensures long running time and low maintenance cost
  • built-in test leak for internal calibration to ensure accurate test results


Type UL1000 Helium Leak Detector
Min. Detectable leak rate for helium ( Vacuum mode ) mbar•L/s <5E-12
Min. detectable leak rate for Helium ( Sniffer mode ) mbar•L/s 5E-8
Max. Inlet pressure GROSS mode mbar 15
Max. Inlet pressure FINE mode mbar 2
Max. Inlet pressure ULTRA mode mbar 0.4
Pumping speed during evacuation m³/h 25 at 50 Hz
Helium pumping speed GROSS mode L/s max.8
Helium pumping speed FINE mode L/s 7
Helium pumping speed ULTRA mode L/s 2.5
Detectable masses 2,3,4 amu
Mass spectrometer Sector field 180°
Filaments ion soure Iridium/Yttria coated  2
Calibrated built in test leak mbar•L/s  E-7
Test port  
Adjustable triggers 2
Interface RS232
Chart recorder output V 2x10
In/Outputs PLC compatible
Permissable ambient temperature (during operation ) °C +10.....+40
Type of protection IP 20
Weight kg | lb. 110 | 242
Dimensions ( L x W xH ) mm | inch 1068x525x850 | 42x21x33 
Supply voltages V (ac)  115(+-10%)60Hz
Power consumption VA 1100


  • maintenance work on semiconductor process tools, with or without support from their own pump
  • applications requiring high pumping speed and senstivity, plus clean testing conditions
  • leak testing of components before they are installed in existing tools
  • inspections and installations of process gas systems
  • built-in software menu "Auto Leak Test" function to perform automatic test of hermetically sealed components with the TC1000 Test Chamber