DRY Helium leak detector UL5000 (DRY Backing Pump), 100/115V, 50/60Hz and US power cable

DRY Helium leak detector UL5000 (DRY Backing Pump), 100/115V, 50/60Hz and US power cable



INFICON DRY Helium leak detector UL5000 (DRY Backing Pump), 100/115V, 50/60Hz and US power cable

Brochure: DRY UL5000 Helium Leak Detector

Check out our new video showing the ZERO Function for the INFICON UL1000 Helium Leak Detector

  • HYDRO-S (HYDROgen-Suppression) to enable test conditions to be reached quickly.
  • I-CAL (Intelligent - Calculation Algorithm for Leak Rates) to ensure fast response to leaks in all measurement ranges.
  • A special multiple inlet turbomolecular pump that provides optimized high helium pumping speeds with high helium compression at all pressures to deliver excellent sensitivity, response, and fast clean-up.
  • A booster turbomolecular pump for extremely fast response on any test object, including the largest volumes and chambers.
  • The field-proven INFICON magnetic sector mass spectrometer for years of accurate and repeatable results in a trouble-free, maintenance-free design.
  • Self-protection features to protect the UL5000 from helium and particulate contamination and even an auto-purge cycle to ensure the UL5000 is ready when you need it.
  • A rotatable display / control interface and optional remote hand controller for operational flexibility.
  • Access control to the unit and system software can be enabled via the software to prevent unauthorized use or unintended modifications to test set-ups.
  • Software updates via e-mail to keep your UL5000 at optimum performance.
  • Work Station Design with an optimal height work surface that includes an ESD mat and tool box for testing convenience.


Type UL5000 Helium Leak Detector
Min. Detectable leak rate for helium ( Vacuum mode ) mbar•L/s <5E-12
Min. detectable leak rate for Helium ( Sniffer mode ) mbar•L/s 5E-8
Max. Inlet pressure GROSS mode mbar 15
Max. Inlet pressure FINE mode mbar 2
Max. Inlet pressure ULTRA mode mbar 0.4
Pumping speed during evacuation m³/h 25 at 50 Hz
Helium pumping speed GROSS mode L/s max.8
Helium pumping speed FINE mode L/s max 20
Helium pumping speed ULTRA mode L/s >20
Detectable masses 2,3,4 amu
Mass spectrometer Sector field 180°
Filaments ion soure Iridium/Yttria coated  2
Calibrated built in test leak mbar•L/s  E-7
Test port   DN40KF
Adjustable triggers 2
Interface RS232
Chart recorder output V 2x10
In/Outputs PLC compatible
Permissable ambient temperature (during operation ) °C +10.....+40
Type of protection IP 20
Weight kg | lb. 140 | 308
Dimensions ( L x W xH ) mm | inch 1068x530x1083 | 42.5x21x42.6 
Supply voltages V (ac)  115(+-10%)60Hz
Power consumption VA 1100


  • Leak testing of components, subassemblies and large chambers used on semiconductor and flat panel display tools
  • Leak testing of semiconductor and flat panel tools
  • Leak testing of aerospace components, subassemblies, and systems
  • Leak testing of storage vessels/storage tanks